Parameter |
NOM |
LSL |
USL |
Units |
Description |
---|---|---|---|---|---|
CMIMA |
2 |
1.8 |
2.2 |
fF/µm2 |
MiM cap area capacitance |
CMIMP |
0.19 |
0.11 |
0.27 |
fF/µm |
MiM cap periphery capacitance |
RSCAPM |
5.8 |
4.8 |
6.8 |
Ω/□ |
MiM top plate sheet resistance |
CMIM2A |
2 |
1.8 |
2.2 |
fF/µm2 |
MiM2 cap area capacitance |
CMIM2P |
0.19 |
0.11 |
0.27 |
fF/µm |
MiM2 cap periphery capacitance |
RSCAPM |
5.8 |
4.8 |
6.8 |
Ω/sq |
MiM2 top plate sheet resistance |