Parameter

NOM

LSL

USL

Units

Description

RSN

120

108

132

Ω/□

N+ diffusion sheet resistance

RSNH

114

102

126

Ω/□

HV N+ diffusion sheet resistance

RSNW

950

550

1350

Ω/□

N-Well sheet resistance

RSP

197

166

228

Ω/□

P+ diffusion sheet resistance

RSPH

191

160

228

Ω/□

HV P+ diffusion sheet resistance

RSPW

3050

2565

3535

Ω/□

P-Well sheet resistance

RSDNW

2200

1825

2575

Ω/□

Deep N-Well sheet resistance

WN

0.157

0.088

0.226

µm

Electrical N+ linewidth (drawn 0.14)

WP

0.144

0.084

0.204

µm

Electrical P+ linewidth (drawn 0.14)

RSGPVDP

48.2

42.2

55.8

Ω/□

poly sheet resistance, with NGNIT

WGPUC15

0.094

0.053

0.135

µm

Electrical poly linewidth (drawn 0.15)

RSLI

12.8

9.2

17.0

Ω/□

Local interconnect sheet resistance

RSM1

0.125

0.105

0.145

Ω/□

Metal-1 sheet resistance

RSM2

0.125

0.105

0.145

Ω/□

Metal-2 sheet resistance

RSM3

0.047

0.038

0.056

Ω/□

Metal-3 sheet resistance

RSM4

0.047

0.038

0.056

Ω/□

Metal-4 sheet resistance

RSM5

0.0285

0.0212

0.0358

Ω/□

Metal-5 sheet resistance