Parameter

NOM

LSL

USL

Units

Description

CMIMA

2

1.8

2.2

fF/µm2

MiM cap area capacitance

CMIMP

0.19

0.11

0.27

fF/µm

MiM cap periphery capacitance

RSCAPM

5.8

4.8

6.8

Ω/□

MiM top plate sheet resistance

CMIM2A

2

1.8

2.2

fF/µm2

MiM2 cap area capacitance

CMIM2P

0.19

0.11

0.27

fF/µm

MiM2 cap periphery capacitance

RSCAPM

5.8

4.8

6.8

Ω/sq

MiM2 top plate sheet resistance