Parameter |
NOM |
LSL |
USL |
Units |
Description |
---|---|---|---|---|---|
RSN |
120 |
108 |
132 |
Ω/□ |
N+ diffusion sheet resistance |
RSNH |
114 |
102 |
126 |
Ω/□ |
HV N+ diffusion sheet resistance |
RSNW |
950 |
550 |
1350 |
Ω/□ |
N-Well sheet resistance |
RSP |
197 |
166 |
228 |
Ω/□ |
P+ diffusion sheet resistance |
RSPH |
191 |
160 |
228 |
Ω/□ |
HV P+ diffusion sheet resistance |
RSPW |
3050 |
2565 |
3535 |
Ω/□ |
P-Well sheet resistance |
RSDNW |
2200 |
1825 |
2575 |
Ω/□ |
Deep N-Well sheet resistance |
WN |
0.157 |
0.088 |
0.226 |
µm |
Electrical N+ linewidth (drawn 0.14) |
WP |
0.144 |
0.084 |
0.204 |
µm |
Electrical P+ linewidth (drawn 0.14) |
RSGPVDP |
48.2 |
42.2 |
55.8 |
Ω/□ |
poly sheet resistance, with NGNIT |
WGPUC15 |
0.094 |
0.053 |
0.135 |
µm |
Electrical poly linewidth (drawn 0.15) |
RSLI |
12.8 |
9.2 |
17.0 |
Ω/□ |
Local interconnect sheet resistance |
RSM1 |
0.125 |
0.105 |
0.145 |
Ω/□ |
Metal-1 sheet resistance |
RSM2 |
0.125 |
0.105 |
0.145 |
Ω/□ |
Metal-2 sheet resistance |
RSM3 |
0.047 |
0.038 |
0.056 |
Ω/□ |
Metal-3 sheet resistance |
RSM4 |
0.047 |
0.038 |
0.056 |
Ω/□ |
Metal-4 sheet resistance |
RSM5 |
0.0285 |
0.0212 |
0.0358 |
Ω/□ |
Metal-5 sheet resistance |